Effect of HF Concentration on Physical and Electronic Properties of Electrochemically Formed Nanoporous Silicon
The most common fabrication technique of porous silicon (PS) is electrochemical etching of a crystalline silicon wafer in a hydrofluoric (HF) acid-based solution. The electrochemical process allows for precise control of the properties of PS such as thickness of the porous layer, porosity, and avera...
Main Authors: | Pushpendra Kumar, Peter Lemmens, Manash Ghosh, Frank Ludwig, Meinhard Schilling |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2009-01-01
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Series: | Journal of Nanomaterials |
Online Access: | http://dx.doi.org/10.1155/2009/728957 |
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