Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

The study investigates the design and fabrication of a micromachined radio frequency (RF) capacitive switch using the complementary metal oxide semiconductor-microelectromechanical system (CMOS-MEMS) technology. The structure of the micromachined switch is composed of a membrane, eight springs, four...

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Bibliographic Details
Main Authors: Cheng-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2015-11-01
Series:Micromachines
Subjects:
micromachined switches
CMOS-MEMS
radio frequency
Online Access:http://www.mdpi.com/2072-666X/6/11/1447

Internet

http://www.mdpi.com/2072-666X/6/11/1447

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