High-frequency micromechanical columnar resonators

High-frequency micromechanical columnar resonators

High-frequency silicon columnar microresonators are fabricated using a simple but effective technological scheme. An optimized fabrication scheme was invented to obtain mechanically protected microcolumns with lateral dimensions controlled on a scale of at least 1 μm. In this paper, we investigate t...

Full description

Bibliographic Details
Main Author: Jenny Kehrbusch, Elena A Ilin, Peter Bozek, Bernhard Radzio and Egbert Oesterschulze
Format: Article
Language:English
Published: Taylor & Francis Group 2009-01-01
Series:Science and Technology of Advanced Materials
Subjects:
microresonator
microcolumn
frequency stability
mass sensor
resonators in viscous fluids
molecular mass
cantilever
Online Access:http://www.iop.org/EJ/abstract/1468-6996/10/3/034601

Internet

http://www.iop.org/EJ/abstract/1468-6996/10/3/034601

Similar Items