Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is t...

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Bibliographic Details
Main Authors: Maeum Han, Jae Keon Kim, Jin-Hyoung Park, Woojin Kim, Shin-Won Kang, Seong Ho Kong, Daewoong Jung
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Sensors
Subjects:
accelerometer
frequency
acceleration
heat convection
Online Access:https://www.mdpi.com/1424-8220/17/8/1765

Internet

https://www.mdpi.com/1424-8220/17/8/1765

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