Investigation and Improvement of 90<formula formulatype="inline"><tex Notation="TeX">$^{\circ}$</tex> </formula> Direct Bends of Metal–Insulator–Silicon–Insulator–Metal Waveguides
We investigate 90° direct bends of metal-insulator-silicon-insulator-metal (MISIM) waveguides, which are hybrid plasmonic waveguides with replaceable insulators. First, we fabricate them using fully standard CMOS technology and characterize them. The experimental excess loss of the two co...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2013-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/6601685/ |