Conical Nanotubes Synthesized by Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> in Etched Ion-Track Nanochannels

Etched ion-track polycarbonate membranes with conical nanochannels of aspect ratios of ~3000 are coated with Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> thin films of thicknesses between 10 and 20 nm by atomic layer deposition (AL...

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Bibliographic Details
Main Authors: Nils Ulrich, Anne Spende, Loïc Burr, Nicolas Sobel, Ina Schubert, Christian Hess, Christina Trautmann, Maria Eugenia Toimil-Molares
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/8/1874