Conical Nanotubes Synthesized by Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> in Etched Ion-Track Nanochannels
Etched ion-track polycarbonate membranes with conical nanochannels of aspect ratios of ~3000 are coated with Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> thin films of thicknesses between 10 and 20 nm by atomic layer deposition (AL...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-07-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/11/8/1874 |