Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

This article presents an experimental investigation on ductile-mode micro-milling of monocrystalline silicon using polycrystalline diamond (PCD) end mills. Experimental results indicate that the irregular fluctuation of cutting force always induces machined surface failure, even in ductile mode. The...

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Bibliographic Details
Main Authors: Jinxuan Bai, Qingshun Bai, Zhen Tong
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Materials
Subjects:
monocrystalline silicon
brittle material
surface failure behavior
discrete dislocation plasticity
crack
Online Access:https://www.mdpi.com/1996-1944/10/12/1424

Internet

https://www.mdpi.com/1996-1944/10/12/1424

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