Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage

This work investigates the dominant energy dissipations of the multi-frequency whispering gallery mode (WGM) resonators to provide an insight into the loss mechanisms of the devices. An extensive theory for each loss source was established and experimentally testified. The squeezed film damping (SFD...

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Bibliographic Details
Main Authors: Zeji Chen, Qianqian Jia, Wenli Liu, Quan Yuan, Yinfang Zhu, Jinling Yang, Fuhua Yang
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Sensors
Subjects:
loss mechanism
MEMS resonator
multi-frequency
quality factor
whispering gallery mode
Online Access:https://www.mdpi.com/1424-8220/20/24/7017

Internet

https://www.mdpi.com/1424-8220/20/24/7017

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