Electric and Magnetic Properties of Sputter Deposited BiFeO3 Films
Polycrystalline BiFeO3 films have been magnetron sputter deposited at room temperature and subsequently heat-treated ex situ at temperatures between 400 and 700°C. The deposition was done in pure Ar atmosphere, as the use of oxygen-argon mixture was found to lead to nonstoichiometric films due to re...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Hindawi Limited
2013-01-01
|
Series: | Advances in Materials Science and Engineering |
Online Access: | http://dx.doi.org/10.1155/2013/857465 |