Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section
Multilayered microresonators commonly use sensitive coating or piezoelectric layers for detection of mass and gas. Most of these microresonators have a variable cross-section that complicates the prediction of their fundamental resonant frequency (generally of the bending mode) through conventional...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2011-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/11/9/8203/ |