Production Flow Analysis in a Semiconductor Fab Using Machine Learning Techniques
In a semiconductor fab, wafer lots are processed in complex sequences with re-entrants and parallel machines. It is necessary to ensure smooth wafer lot flows by detecting potential disturbances in a real-time fashion to satisfy the wafer lots' demands. This study aims to identify production fa...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-02-01
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| Series: | Processes |
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| Online Access: | https://www.mdpi.com/2227-9717/9/3/407 |