A global modeling approach of the leakage phenomena in dielectrics
Thanks to its low noise level, the LSBB environment provides particular environment to carry out high quality electrical characterizations. In this paper, we propose a complete modeling approach of the experimental results from our experimental microelectronic setup. The tested device is a Metal Oxi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2019/14/e3sconf_i-dust2018_05002.pdf |