Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology

Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology

A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on the analysis of homodyne interferometer fringe pat...

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Bibliographic Details
Main Authors: Yindi Cai, Baokai Feng, Qi Sang, Kuang-Chao Fan
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Sensors
Subjects:
homodyne interferometer
laser diode
wavelength correction
wavelength stabilization
positioning stage
Online Access:https://www.mdpi.com/1424-8220/19/20/4587

Internet

https://www.mdpi.com/1424-8220/19/20/4587

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