Monolithic Integration of InP Wire and <inline-formula> <tex-math notation="LaTeX">$\mbox{SiO}_x$</tex-math></inline-formula> Waveguides on Si Platform

We report a low-loss InP wire waveguide monolithically integrated with an SiO<sub>x</sub> waveguide on an Si platform. By means of directly bonding InP to SiO 2, we realized a submicrometer-scale InP wire waveguide with high optical confinement. In addition, a several-micrometer-scale Si...

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Bibliographic Details
Main Authors: H. Nishi, K. Takeda, T. Tsuchizawa, T. Fujii, S. Matsuo, K. Yamada, T. Yamamoto
Format: Article
Language:English
Published: IEEE 2015-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/7247627/