Monolithic Integration of InP Wire and <inline-formula> <tex-math notation="LaTeX">$\mbox{SiO}_x$</tex-math></inline-formula> Waveguides on Si Platform
We report a low-loss InP wire waveguide monolithically integrated with an SiO<sub>x</sub> waveguide on an Si platform. By means of directly bonding InP to SiO 2, we realized a submicrometer-scale InP wire waveguide with high optical confinement. In addition, a several-micrometer-scale Si...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2015-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/7247627/ |