Morphology Evaluation of Microelectronic Packaging Substrates Using Shadow Moiré Technique

The surface quality and long-term reliability of packaging substrates in microelectronic packaging processes have become subjects of increasing concern as circuit board component density increases while the pitches of these components decrease. As a result, packaging substrate morphology inspection...

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Bibliographic Details
Main Authors: Fulong Zhu, Xinxin Lin, Wei Zhang, Jiajie Fan, Sheng Liu
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8370237/