A Two-Dimensional CMUT Linear Array for Underwater Applications: Directivity Analysis and Design Optimization
Capacitive micromachined ultrasonic transducers (CMUTs) are one of the promising MEMS devices. This paper proposed an integrated vibration membrane structure to design a two-dimensional CMUT linear array for underwater applications. The operation frequencies for different medium have been calculated...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2016-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2016/5298197 |