Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology

Abstract A novel in situ imaging solution and detectors array for the focused electron beam (e-beam) are the first time proposed and demonstrated. The proposed in-tool, on-wafer e-beam detectors array features full FinFET CMOS logic compatibility, compact 2 T pixel structure, fast response, high res...

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Bibliographic Details
Main Authors: Chien-Ping Wang, Burn Jeng Lin, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin, Ya-Chin King
Format: Article
Language:English
Published: SpringerOpen 2021-05-01
Series:Nanoscale Research Letters
Subjects:
Electron beam (e-beam)
Detectors array
FinFET CMOS technologies
Online Access:https://doi.org/10.1186/s11671-021-03552-9

Internet

https://doi.org/10.1186/s11671-021-03552-9

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