Preparation of Double-sided Nanostructure Based on Soft-nanoimprinting Lithography
Double-sided nanostructure has more excellent properties in high efficiency, high yield, and high capability devices, which becomes the attention spots in nanofabrication technology. We proposed a very simple method to fabricate the double-sided nanostructure on polymer elastic substrate. By using t...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
JommPublish
2018-12-01
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| Series: | Journal of Microelectronic Manufacturing |
| Subjects: | |
| Online Access: | http://www.jommpublish.org/p/17/ |