Preparation of Double-sided Nanostructure Based on Soft-nanoimprinting Lithography
Double-sided nanostructure has more excellent properties in high efficiency, high yield, and high capability devices, which becomes the attention spots in nanofabrication technology. We proposed a very simple method to fabricate the double-sided nanostructure on polymer elastic substrate. By using t...
Main Authors: | Man Zhang, Qiling Deng, Hui Pang, Lifang Shi, Axiu Cao |
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Format: | Article |
Language: | English |
Published: |
JommPublish
2018-12-01
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Series: | Journal of Microelectronic Manufacturing |
Subjects: | |
Online Access: | http://www.jommpublish.org/p/17/ |
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