Sapphire-Based Dammann Gratings for UV Beam Splitting
We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together wit...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7605520/ |