APPLICATION OF NANOPOROUS ANODIC ALUMINA BY GAS MICROSYSTEM DESIGN
Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermalconductivity coefficients as a function of α-Al2O3 porosity obtained by FEA were utilized in the...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-04-01
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| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/139 |