Optimization of the electrostatic structure of the ion microprobe
The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 · mrad2 · MeV. To achieve higher microprobe resolution it is intended to place an electrosta...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute for Nuclear Research, National Academy of Sciences of Ukraine
2012-03-01
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| Series: | Âderna Fìzika ta Energetika |
| Subjects: | |
| Online Access: | http://jnpae.kinr.kiev.ua/13.1/Articles_PDF/jnpae-2012-13-0097-Ignatev.pdf |