CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY

CONSTRUCTIVELY TECHNOLOGICAL PRINCIPLES OF CAPACITIVE HUMIDITY SENSING Al2O3 NANOSTRUCTURES AND SENSITIVE PARAMETERS STUDY

Volumetric-surface variants of capacitive MDM (metal-dielectric-metal) structures of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements were designed. The improved humidity sensitivity, reduced response and reco...

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Bibliographic Details
Main Author: D.L. Shimanovich
Format: Article
Language:Russian
Published: Tver State University 2015-11-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
Subjects:
aluminum
electrochemical anodization
porous alumina
barrier layer
membrane
nanostructured material
humidity sensing element
adsorption
response time
recovery time
sensitivity
Online Access:http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdf

Internet

http://physchemaspects.ru/archives/2015/%D0%A4%D0%A5-2015%20%D0%A8%D0%B8%D0%BC%D0%B0%D0%BD%D0%BE%D0%B2%D0%B8%D1%87%20%D0%94%D0%9B.pdf

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