Analysis of a Lateral Grain Boundary for Reducing Performance Variations in Poly-Si 1T-DRAM

A capacitorless one-transistor dynamic random-access memory device that uses a poly-silicon body (poly-Si 1T-DRAM) has been suggested to overcome the scaling limit of conventional one-transistor one-capacitor dynamic random-access memory (1T-1C DRAM). A poly-Si 1T-DRAM cell operates as a memory by u...

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Bibliographic Details
Main Authors: Songyi Yoo, Wookyung Sun, Hyungsoon Shin
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/11/11/952