A Real-Time Thermal Self-Elimination Method for Static Mode Operated Freestanding Piezoresistive Microcantilever-Based Biosensors

A Real-Time Thermal Self-Elimination Method for Static Mode Operated Freestanding Piezoresistive Microcantilever-Based Biosensors

Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature sensor, and a multilayer microcantilever with an emb...

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Bibliographic Details
Main Authors: Yu-Fu Ku, Long-Sun Huang, Yi-Kuang Yen
Format: Article
Language:English
Published: MDPI AG 2018-02-01
Series:Biosensors
Subjects:
thermal elimination
piezoresistive microcantilever
system miniaturization
Online Access:http://www.mdpi.com/2079-6374/8/1/18

Internet

http://www.mdpi.com/2079-6374/8/1/18

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