Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method

Bibliographic Details
Main Authors: Ide, Y., Inada, K., Nakamura, T.
Format: Article
Language:English
Published: De Gruyter 2000-03-01
Series:High Temperature Materials and Processes
Online Access:https://doi.org/10.1515/HTMP.2000.19.3-4.265