Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method
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| Format: | Article |
| Language: | English |
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De Gruyter
2000-03-01
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| Series: | High Temperature Materials and Processes |
| Online Access: | https://doi.org/10.1515/HTMP.2000.19.3-4.265 |
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doaj-742fa2b364f940d69bb51d3db420816b |
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Article |
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doaj-742fa2b364f940d69bb51d3db420816b2021-09-06T19:19:09ZengDe GruyterHigh Temperature Materials and Processes0334-64552191-03242000-03-01193-426527410.1515/HTMP.2000.19.3-4.265Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) MethodIde, Y.Inada, K.Nakamura, T.https://doi.org/10.1515/HTMP.2000.19.3-4.265 |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Ide, Y. Inada, K. Nakamura, T. |
| spellingShingle |
Ide, Y. Inada, K. Nakamura, T. Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method High Temperature Materials and Processes |
| author_facet |
Ide, Y. Inada, K. Nakamura, T. |
| author_sort |
Ide, Y. |
| title |
Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method |
| title_short |
Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method |
| title_full |
Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method |
| title_fullStr |
Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method |
| title_full_unstemmed |
Formation of Al-Cr-N Films by an Activated Reactive Evaporation (ARE) Method |
| title_sort |
formation of al-cr-n films by an activated reactive evaporation (are) method |
| publisher |
De Gruyter |
| series |
High Temperature Materials and Processes |
| issn |
0334-6455 2191-0324 |
| publishDate |
2000-03-01 |
| url |
https://doi.org/10.1515/HTMP.2000.19.3-4.265 |
| work_keys_str_mv |
AT idey formationofalcrnfilmsbyanactivatedreactiveevaporationaremethod AT inadak formationofalcrnfilmsbyanactivatedreactiveevaporationaremethod AT nakamurat formationofalcrnfilmsbyanactivatedreactiveevaporationaremethod |
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1717778936746737664 |