Design of a Novel Capacitive Pressure Sensor
A novel capacitive pressure sensor based on surface micromachining technology is proposed and simulated. The sense element is considered as a parallel plate capacitor with one electrode fixed to the substrate, and the other suspended on a polysilicon diaphragm. In the presence of an oil pressure, th...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2007-08-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_07/P_171.pdf |