Ultraviolet Photodetection Application in Magnesium Indium Oxide Thin Film Transistors via Co-Sputtering Deposition

A magnesium-doped indium oxide (In<sub>2</sub>O<sub>3</sub>:Mg) ultraviolet (UV) thin film phototransistor was fabricated via cosputtering of MgO and In<sub>2</sub>O<sub>3</sub>. Three samples with different sputtering power values of In<sub>2<...

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Bibliographic Details
Main Authors: Chih-Chiang Yang, Kuan-Yu Chen, Wei-Sheng Yeh, Yan-Kuin Su, Zi-Hao Wang
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/10/15/5128