The First Frequency-Modulated (FM) Pitch Gyroscope

The First Frequency-Modulated (FM) Pitch Gyroscope

In this work, the mechanical design and the experimental validation of a micro-electromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ know...

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Bibliographic Details
Main Authors: Valentina Zega, Paolo Minotti, Giorgio Mussi, Alessandro Tocchio, Luca Falorni, Stefano Facchinetti, Andrea Bonfanti, Andrea L. Lacaita, Claudia Comi, Giacomo Langfelder, Alberto Corigliano
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
MEMS
frequency modulation (FM)
pitch gyroscope
Online Access:https://www.mdpi.com/2504-3900/1/4/393

Internet

https://www.mdpi.com/2504-3900/1/4/393

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