Highly Sensitive Sensor Structure Based on Sol-Gel Waveguide Films and Grating Couplers
The technologies of optical planar evanescent wave chemical and biochemical sensors require chemically resistant, high refractive index waveguide films having very good optical transmission properties. In this paper we present such two-compound SiO<sub>x</sub>:TiO<sub>y</sub>...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-06-01
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Series: | Electronics |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-9292/10/12/1389 |