Transverse Spurious Mode Compensation for AlN Lamb Wave Resonators
Lamb wave modes with type I dispersion characteristics exhibit strong affinity toward multi transverse modes behavior above resonance frequency (f<sub>r</sub>) in the AlN Lamb wave resonators (LWRs), especially the high-transduction-efficiency modes: S<sub>0</sub> and S<su...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8676300/ |