Design and Experiment of Dual-Mass MEMS Gyroscope Sense Closed System Based on Bipole Compensation Method
This paper presents a sense mode closed-loop method for dual-mass micro-electro-mechanical system (MEMS) gyroscope based on the bipole temperature compensation method. A pair of conjugate poles are investigated as the bottle neck of the sense closed-loop system of MEMS gyroscope, and the bipole temp...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8685688/ |