Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor

In this paper, the out-gassing from PolyEthylene (PE) film is studied under nuclear irradiation for the design and fabrication of passive MEMS dosimeters. The fabrication of sensor needs high temperature process that leads to specific constraints on the PE film. Radiation chemical yield of hydrogen...

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Bibliographic Details
Main Authors: Dheraaj Kumar, Julien Philippe, Samuel Charlot, Sandrine Assié, Aurélie Lecestre, André Ferrand, Hervé Aubert, Patrick Pons
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/2/13/718