Polyethylene Outgassing Study for MEMS Nuclear Radiation Sensor
In this paper, the out-gassing from PolyEthylene (PE) film is studied under nuclear irradiation for the design and fabrication of passive MEMS dosimeters. The fabrication of sensor needs high temperature process that leads to specific constraints on the PE film. Radiation chemical yield of hydrogen...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-11-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/2/13/718 |