Investigation of the influence of the number of modules of a multicluster technological complex and the operations performed by them on the overall performance of the installation using simulation simulations

Variety of compositions of multicluster tools determines the development of methods aimed at analysis and search of feasible compositions, which meet the requirements and optimal performance (throughput) criteria. Very often in the industry, there is a task to find optimum utilization of the cluster...

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Bibliographic Details
Main Authors: I. N. Kulikov, L. L. Kolesnik
Format: Article
Language:Russian
Published: Voronezh state university of engineering technologies 2018-10-01
Series:Vestnik Voronežskogo Gosudarstvennogo Universiteta Inženernyh Tehnologij
Subjects:
Online Access:https://www.vestnik-vsuet.ru/vguit/article/view/1784