The Early Steps of Molecule-to-Material Conversion in Chemical Vapor Deposition (CVD): A Case Study

The Early Steps of Molecule-to-Material Conversion in Chemical Vapor Deposition (CVD): A Case Study

Transition metal complexes with β-diketonate and diamine ligands are valuable precursors for chemical vapor deposition (CVD) of metal oxide nanomaterials, but the metal-ligand bond dissociation mechanism on the growth surface is not yet clarified in detail. We address this question by density functi...

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Bibliographic Details
Main Authors: Davide Barreca, Ettore Fois, Alberto Gasparotto, Chiara Maccato, Mario Oriani, Gloria Tabacchi
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Molecules
Subjects:
chemical vapor deposition
density functional theory
zinc oxide precursors
transition metal complexes
molecular dynamics simulations
oxide nanomaterials
Online Access:https://www.mdpi.com/1420-3049/26/7/1988

Internet

https://www.mdpi.com/1420-3049/26/7/1988

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