Multiscale Molecular Dynamics Simulation of Plasma Processing: Application to Plasma Sputtering
Molecular dynamics is an atomistic tool that is able to treat dynamics of atom/molecules/cluster assemblies mainly in the condensed and liquid phases. The goal of the present article is to provide a new methodology for describing all phenomena of plasma processing and beyond such as gas phase chemis...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2018-06-01
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| Series: | Frontiers in Physics |
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| Online Access: | https://www.frontiersin.org/article/10.3389/fphy.2018.00059/full |