Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements

Effect of the deposition conditions of platinum electrodes on their performance as resistive heating elements

The performance of different platinum electrodes used as resistive heating elements was studied. Pt films having different thickness were deposited by RF magnetron sputtering at room temperature followed by post-deposition annealing at 700 ºC or made in-situ at 700 ºC. The Pt films were deposited ov...

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Bibliographic Details
Main Authors: Andrei Ionut Mardare, Cezarina Cela Mardare, Ednan Joanni
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2004-09-01
Series:Materials Research
Subjects:
joule heating
platinum
thin films
bottom electrodes
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392004000300009

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