Nanostructural Characterisation and Optical Properties of Sputter-Deposited Thick Indium Tin Oxide (ITO) Coatings

Nanostructural Characterisation and Optical Properties of Sputter-Deposited Thick Indium Tin Oxide (ITO) Coatings

Indium tin oxide (ITO) thin films, used in many optoelectronic applications, are typically grown to a thickness of a maximum of a few hundred nanometres. In this work, the composition, microstructure and optical/electrical properties of thick ITO coatings deposited by radio frequency magnetron sputt...

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Bibliographic Details
Main Authors: Andrius Subacius, Bill Baloukas, Etienne Bousser, Steve J. Hinder, Mark A. Baker, Claus Rebholz, Allan Matthews
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Coatings
Subjects:
indium tin oxide
ITO
coatings
magnetron sputtering
thickness
structure
Online Access:https://www.mdpi.com/2079-6412/10/11/1127

Internet

https://www.mdpi.com/2079-6412/10/11/1127

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