Assembly technology and design features of microelectronic coordinate-sensitive detectors
The design features and assembly technology of microelectronic coordinate-sensitive detectors of charged particles for spectroscopy are considered. The device is based on the specialized very-large-scale integration (VLSI) crystal manufactured using CMOS technology and containing a charge-sensitive...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2018-02-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2018/1_2018/pdf/03.pdf |