FEI Helios NanoLab 400S FIB-SEM
The FEI Helios NanoLab400S FIB-SEM is one of the world's most advanced DualBeamTM focused ion beam (FIB) platforms for transmission electron microscopy (TEM) sample preparation, scanning electron microscopy (SEM) imaging and analysis in semiconductor failure analysis, process development and pr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Forschungszentrum Jülich
2016-03-01
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| Series: | Journal of large-scale research facilities JLSRF |
| Online Access: | https://jlsrf.org/index.php/lsf/article/view/106 |