Thin-film SnO<sub>2</sub> and ZnO detectors of hydrogen peroxide vapors
Thin-film hydrogen peroxide vapor sensors made from Co-doped SnO<sub>2</sub> and La-doped ZnO were manufactured using the high-frequency magnetron sputtering method. Thicknesses of deposited doped metal oxide films were measured and their morphology was investigated. The gas sensing c...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2018-04-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/7/281/2018/jsss-7-281-2018.pdf |