Inorganic and Organic Screen-printed Cantilever-based Gas Sensors
Researches on microcantilever MEMS are numerous in different areas, physical or chemical sensing, actuation or energy harvesting. Because of their high sensitivity at room temperature, they have been shown to be interesting for gas detection. Though silicon technology allows the processing of such c...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2014-06-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/june_2014/Vol_173/P_RP_0148.pdf |