Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic...

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Bibliographic Details
Main Authors: Arti Tibrewala, Norbert Hofmann, Anurak Phataralaoha, Gerd Jäger, Stephanus Büttgenbach
Format: Article
Language:English
Published: MDPI AG 2009-04-01
Series:Sensors
Subjects:
Force sensors
diffused piezoresistors
swastika membrane
3D measurements
NPMM
Online Access:http://www.mdpi.com/1424-8220/9/5/3228/

Internet

http://www.mdpi.com/1424-8220/9/5/3228/

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