Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2009-04-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/9/5/3228/ |