Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic...
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doaj-78db391cb3c945bfae0e458495a706762020-11-24T21:53:05ZengMDPI AGSensors1424-82202009-04-01953228323910.3390/s90503228Development of 3D Force Sensors for Nanopositioning and Nanomeasuring MachineArti TibrewalaNorbert HofmannAnurak PhataralaohaGerd JägerStephanus BüttgenbachIn this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor. http://www.mdpi.com/1424-8220/9/5/3228/Force sensorsdiffused piezoresistorsswastika membrane3D measurementsNPMM |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Arti Tibrewala Norbert Hofmann Anurak Phataralaoha Gerd Jäger Stephanus Büttgenbach |
spellingShingle |
Arti Tibrewala Norbert Hofmann Anurak Phataralaoha Gerd Jäger Stephanus Büttgenbach Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine Sensors Force sensors diffused piezoresistors swastika membrane 3D measurements NPMM |
author_facet |
Arti Tibrewala Norbert Hofmann Anurak Phataralaoha Gerd Jäger Stephanus Büttgenbach |
author_sort |
Arti Tibrewala |
title |
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine |
title_short |
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine |
title_full |
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine |
title_fullStr |
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine |
title_full_unstemmed |
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine |
title_sort |
development of 3d force sensors for nanopositioning and nanomeasuring machine |
publisher |
MDPI AG |
series |
Sensors |
issn |
1424-8220 |
publishDate |
2009-04-01 |
description |
In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor. |
topic |
Force sensors diffused piezoresistors swastika membrane 3D measurements NPMM |
url |
http://www.mdpi.com/1424-8220/9/5/3228/ |
work_keys_str_mv |
AT artitibrewala developmentof3dforcesensorsfornanopositioningandnanomeasuringmachine AT norberthofmann developmentof3dforcesensorsfornanopositioningandnanomeasuringmachine AT anurakphataralaoha developmentof3dforcesensorsfornanopositioningandnanomeasuringmachine AT gerdjager developmentof3dforcesensorsfornanopositioningandnanomeasuringmachine AT stephanusbuttgenbach developmentof3dforcesensorsfornanopositioningandnanomeasuringmachine |
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