Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine

• Main Authors: Arti Tibrewala, Norbert Hofmann, Anurak Phataralaoha, Gerd Jäger, Stephanus Büttgenbach
• Format: Article
• Language: English
• Published: MDPI AG 2009-04-01
• Series: Sensors
• Subjects: Force sensors; diffused piezoresistors; swastika membrane; 3D measurements; NPMM
• Online Access: http://www.mdpi.com/1424-8220/9/5/3228/

In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.