Extraction of ions and electrons from audio frequency plasma source
Herein, the extraction of high ion / electron current from an audio frequency (AF) nitrogen gas discharge (10 – 100 kHz) is studied and investigated. This system is featured by its small size (L= 20 cm and inner diameter = 3.4 cm) and its capacitive discharge electrodes inside the tube and its high...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-09-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4964314 |