Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition

Dependence of crystalline, ferroelectric and fracture toughness on annealing in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition

Crystalline, electric and fracture properties of Pb(Zr0.52Ti0.48)O3 (PZT) thin films are strongly affected by annealing temperatures in rapid treatment annealing (RTA) of metal organic decomposition (MOD). X-ray diffraction (XRD), RT66A standard ferroelectric analyzer and Vickers indentation method...

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Bibliographic Details
Main Authors: Xuejun Zheng, Yichun Zhou, Zhi Yan
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2003-12-01
Series:Materials Research
Subjects:
PZT thin film
Annealing procedure
X-ray diffraction
ferroelectric property
Fracture toughness
Online Access:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000400022

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http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000400022

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