Novel Pattern-Centric Solution for XtackingTM AFM Metrology

Novel Pattern-Centric Solution for XtackingTM AFM Metrology

3D NAND (three-dimensional NAND type) has rapidly become the standard technology for enterprise flash memories, and is also gaining widespread use in other applications. Continued manufacturing process improvements are essential in delivering memory devices with higher I/O performance, higher bit de...

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Bibliographic Details
Main Authors: Sicong Wang, Jian Mi, Abhishek Vikram, Gao Xu, Guojie Chen, Liming Zhang, Pan Liu
Format: Article
Language:English
Published: JommPublish 2019-12-01
Series:Journal of Microelectronic Manufacturing
Subjects:
via
dishing
afm
image
metrology
3d nand
Online Access:http://www.jommpublish.org/p/39/#

Internet

http://www.jommpublish.org/p/39/#

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