A Surface Micromachined CMOS MEMS Humidity Sensor

A Surface Micromachined CMOS MEMS Humidity Sensor

This paper reports a CMOS MEMS (complementary metal oxide semiconductor micro electromechanical system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS and post-CMOS technologies were used to fabricate the piezoresistive humidity sensor. Compared with a b...

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Bibliographic Details
Main Authors: Jian-Qiu Huang, Fei Li, Min Zhao, Kai Wang
Format: Article
Language:English
Published: MDPI AG 2015-10-01
Series:Micromachines
Subjects:
microcantilever
humidity sensor
silicon epitaxy
pre-CMOS
post CMOS
Online Access:http://www.mdpi.com/2072-666X/6/10/1440

Internet

http://www.mdpi.com/2072-666X/6/10/1440

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