Design and optimization of an integrated MEMS gas chamber with high transmissivity

Design and optimization of an integrated MEMS gas chamber with high transmissivity

Non-Dispersive InfraRed (NDIR) gas sensor is widely used for gas detection in collieries and the gas chemical industry, etc. The performance of the NDIR gas sensor depends on the volume, optical length and transmittance of the gas chamber. However, the existing gas sensor products have problems of l...

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Bibliographic Details
Main Authors: Yang Jing, Cheng Yuhua, Yuan Yupeng, Li Xiaofei, Zhang Zuwei, Xu Ming, Wang Dengpan, Mu Jiangdong, Mei Yong, Zhang Yuzhe
Format: Article
Language:English
Published: KeAi Communications Co., Ltd. 2021-02-01
Series:Digital Communications and Networks
Subjects:
NDIR
Gas sensor
Gas chamber
MEMS
Online Access:http://www.sciencedirect.com/science/article/pii/S2352864820300250

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http://www.sciencedirect.com/science/article/pii/S2352864820300250

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